MICA-1600 X-Ray Spectrometer

MICA-1600 microcalorimeter energy dispersive x-ray spectrometer shown mounted on Hitachi S-4800 FE SEM

• Energy resolution better than
10 eV FWHM at 1.7 keV

• Count rate of approximately 10 k cps

• A large sensing area of up to 4mm2

• Works to within approximately
45 mm of the sample

• Operates with a 0.1 K refrigerator
that only consumes clean electricity

• Absolutely no liquid cryogens are used

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STAR Cryoelectronics' new MICA-1600 is a next generation EDS that combines conventional EDS with WDS resolution into a single instrument to provide the high resolution, throughput, uptime and ease-of-use required for materials characterization and analysis. Its unique microcalorimeter provides energy resolution better than 10 eV FWHM at 1.7 keV to easily resolve line overlaps, detect light elements and characterize the thinnest, smallest features at very low beam voltages. And it does so at a count rate of approximately 10 k cps.
     
Microcal EDS Pulsegraph   Pulse 7 Spectrum Zoom
     

Microcal EDS Pulsegraph
(PDF File) 800 KB

The MICA-1600 provides simple, accurate quantitative analysis across the entire energy band. See clear detection of chemistry-dependent satellite lines.

For more information, contact Hideo Naito, Marketing Director, STAR Cryoelectronics today at 408-722-8478 or microcal@starcryo.com.

 

 

 

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