FOUNDRY
SERVICES
• Robust Nb/Al-AlOx/Nb
Josephson junction trilayer process for 150-mm wafers
• AuPd resistors
• SiO2
and Si3N4
dielectrics
• Standard 100 A/cm2,
1 W/sq process
STAR Cryoelectronics is a leading manufacturer of advanced magnetic
sensors based on low temperature superconductor (LTS) and high temperature
superconductor (HTS) thin films. STARCryo's robust
Nb/Al-AlOx/Nb trilayer Josephson junction process for 150 mm wafers
is optimized specifically for the fabrication of Superconducting QUantum
Interference Device (SQUID) sensors and is the only commercial LTS foundry
for 150 mm wafers currently available.
STARCryo offers foundry services for the fabrication of low-Tc Josephson junction devices and dc SQUIDs, as well as
custom thin-film microfabrication services. The Josephson junction process
is based on a standard critical current density of
100 A/cm2. Shunt resistors are
made using AuPd thin films, ensuring proper operation at all temperatures.
The standard sheet resistance is 1 W/sq.
Other critical current densities and sheet resistances are available
upon request.
Design data may be submitted to STARCryo in GDSII,
CIF, XIC, and KIC formats. Please contact STAR Cryoelectronics for process
specifications and pricing.
Foundry
Services Guide
(PDF Format) 317 KB
