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STAR Cryoelectronics is a leading
manufacturer of advanced magnetic sensors based on low temperature
superconductor (LTS) and high temperature superconductor (HTS)
thin films. STARCryo's robust Nb/Al-AlOx/Nb trilayer Josephson junction process for 150 mm wafers
is optimized specifically for the fabrication of Superconducting
QUantum Interference Device (SQUID) sensors and is the only
commercial LTS foundry for 150 mm wafers currently available.
STARCryo offers foundry services for the fabrication
of low-Tc Josephson junction devices and dc SQUIDs, as well as
custom thin-film microfabrication services. The Josephson
junction process is based on a standard critical current density
of
100 A/cm2. Shunt resistors
are made using AuPd thin films, ensuring proper operation
at all temperatures. The standard sheet resistance is 1 W/sq.
Other critical current densities and sheet resistances are
available upon request.
Design data may be submitted to STARCryo
in GDSII, CIF, XIC, and KIC formats. Please contact STAR Cryoelectronics
for process specifications and pricing.
Foundry
Services Guide
(PDF Format) 317 KB
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